SEZ / LAM Wet Process Spare Parts
Full-range spare parts and upgrade hardware for single-wafer wet cleaning and etching equipment.
Request a Quotation →Supported platforms
200mm
- ▪SP101
- ▪SP102
- ▪SP201
- ▪SP202
- ▪SP203
- ▪SP203L
- ▪SP223
- ▪SP4200
- ▪DV24/28
300mm
- ▪SP303
- ▪SP304
- ▪SP323
- ▪SP4300
- ▪DV34/38
Spare Parts Categories
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Full spare parts range & inventory management
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Discontinued part replacement solutions
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Upgrade hardware
Upgrade Hardware
Shippable upgrade solutions for wet process tools — reduce cost and improve performance.
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Chemical Online Heater
up to 80% energy saving, no water tank, low maintenance
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Chemical Concentration Monitoring & Control
real-time monitoring, longer chemical life, lower consumption
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High-Purity Chemical Delivery System (CDS)
accurate mixing and regulation for multiple wet process tools
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Ultrasonic Flow Meter Upgrade
replaces contact-type meters, reduces metal contamination